automatic: TIGER®

Semi automatic Front End RCA Plant

  • The plant is build as Digestorium with exhaust socket and adjustable exhaust air flap.
  • It is possible to process Wafer with diameter 200 mm in a Standard-Carrier.

Alteration right reservation to introduce improvements

  • Easy maintenance access
  • Optimized footprint
  • Short bath changing times
  • DI- Watergun
  • N2-Gun
  • Additional process bathes
  • Dosing system
  • H2O2 Spiking
  • Process data logging