Spray Acid Tool SAT
- Etch
- Strip
- Clean
- Ozone
- Manual loading or fully automated handling
- 2″-12″ wafers and individual substrates
- 150 mm/200 mm/ 300 mm bridge configuration possible
- individual batch sizes (13, 25, 26, 50, 52, … wafers per batch)
- Up to 7 heated tanks
- Single Chamber oder multiple chamber design
- In-situ chemical blending and monitoring
- SECS/GEM Interface
- Standard carrier or protective carrier
Dimensions
Alteration right reservation to introduce improvements
Technical data
Further Information after request.
Brochure
